High temperature circulator
Heat exchanger TEX-25A
Code No.： 0031547-000
Circulation the hot water up to +80℃ with high accuracy ± 0.5℃ . Various customized such as heater output and pump capacity upon the request.
Applications● Heating control in high temp. range for Semiconductor manufacturing equipment.
Hot medium circulator specializes in the heating temperature control.Designed being used with fuorine-based heating medium (Galden® HT270 or HT200) for the heating control in high temperature range (＋70℃ -＋200℃ ).
Temperature drop quickly for Maintenance.Make cooling water flow into cooling coil. e.g.; In the case the cooling water +20 ℃ , it takes approx. 25 minutes to lower +70 ℃ from +200 ℃ .
|Temperature range||+70℃ - +200℃|
|Control accuracy(*1)||PID controller, ±0.5℃|
|Pumping capacity||Flow rate: 14L/min（0.2MPa at +150℃）|
Motor output: 1.1kW
|Temp. rise and drop time(*2)||Temp. rise time（+70℃→+200℃）：approx. 30 min（cooling water OFF）|
Temp. drop time（+200℃→+70℃）：approx. 25 min（cooling water ON）, Cooling water condition：approx.8L/min at +20℃
|Safety device/function||Short/Over current breaker, Circulating fluid high temperature, Temperature abnormal, Low fluid cut off, Liquid high-level, Pump overload|
|INPUT/OUTPUT functions||Remote temperature control connector, Temp. monitor signal output, Safety device actuation signal output|
|Heating medium (Circulating fluid)||GALDEN HT270 or HT200 (cannot be mixed)|
|Fluid tank capacity||approx.3L（＋Reserve tank：approx.7L）|
|Connecting pipe diameter||Circulating fluid in/out：Rc1/2, Primary cooling water in/out：Rc1/2|
|External dimensions ／ Weight||406×761×924Hmm, approx. 115kg|
|Power Supply (three phase AC200V, 50/60Hz)||15A|
|Standard accessories||Signal connector, power connector, spare fuse|
|(*1)When the circulation flow rate is less 5 L/min at no load.|
|(*2)The unit alone at no-load. The specifications were when using GALDEN HT270.|
|●Ambient temperature range for this product is +7℃ - +35℃ .|
|●The fee for Delivery, Installing, Piping work and Wiring work are quoted separately.|