Product Info
High temperature circulator
Heat exchanger TEX-25A
Code No.： 0031547-000
Specialized in using fluorine-based heating medium for the heating control in high temperature range.
Applications
● Heating control in high temp. range for Semiconductor manufacturing equipmentDown Load（Useful Information）
General CatalogFeatures
Hot medium circulator specializes in the heating temperature control.
Designed to be used with fuorine-based heating medium (Galden® HT270) for the heating control in high temperature range (+70℃ to +200℃). Please note that this product cannot be used for cooling applications.Temperature drop quickly for Maintenance.
To lower the temperature quickly in case of maintenance, etc. that requires access to the internal structure, make the cooling water flow into the cooling coil. For example, in the case of cooling water +20℃, it takes approx. 25 minutes to lower to +70℃ from +200℃.Specifications
| Model | TEX-25A |
|---|---|
| Temperature range | +70℃ to +200℃ |
| Control accuracy(*1) | PID controller, ±0.5℃ |
| Heater output | 2.5kW |
| Pumping capacity | Flow rate: 14L/min（0.2 MPa, when circulating fluid is +150℃） Motor output: 1.1kW |
| Temp. rise and drop time(*2) | Temp. rise time（+70℃→+200℃）：approx. 30 min（cooling water OFF） Temp. drop time（+200℃→+70℃）：approx. 25 min（cooling water ON）, Cooling water condition：approx.8L/min at +20℃ |
| Safety device/function | Short/Over current breaker, Circulating fluid high temperature, Temperature abnormal, Low fluid cut off, Liquid high-level, Pump overload |
| INPUT/OUTPUT functions | Remote temperature control connector, Heater ON/OFF input, Cooling water ON/OFF input, Temp. monitor signal output, Safety |
| device actuation signal output | |
| Heating medium (Circulating fluid) | GALDEN® HT270 or HT200 (cannot be mixed in) |
| Fluid tank capacity | approx. 3L（＋Reserve tank：approx. 7L） |
| Connecting pipe diameter | Circulating fluid in/out：Rc1/2, Primary cooling water in/out：Rc1/2 |
| Dimensions ／ Weight | 406×761×924H mm, approx. 115kg |
| Power Supply (three phase AC200V, 50/60Hz) | 15A |
| Operation current | 12A |
| Standard accessories | Signal connector, power connector |
| (*1)When the circulation flow rate is less than 5 L/min at no load. | |
| (*2)The unit alone at no-load. | |
| •Ambient temperature range for this product is +7℃ to +35℃. | |
| •The fee for Delivery, Installing, Piping work, and Wiring work are quoted separately. | |
Dimensions
